Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Semitool Inc. Raider SP310

Asset ID: 18839

Print spec sheet

Semitool Inc.

Raider SP310

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The robot and PC are missing.

Install Type is stand alone.

Control System is VME.

Software Version is 2.12.8.1

Last PM date is 2013/04/08.

Off Line date is 2013/04/08.

The decontamination report is exists.

Platform type is Raider.

Robot type is SEMITOOL.

Polisher Skins(window) is Opaque.

Membrane Type is NEOPRENE.

The chamber 1~10 process are Capsule.

The application information:

Backside: Chamber 1~10 are decontamination clean.

Other Applications: Chamber 1~10 are Post ash clean.

Chemical Delivery:

Tank 1 Chemical: H2SO4

Temperature: 30

Volume: 20L

Tank 3 Chemical: H2SO4+H2O2+DI

Temperature: 30

Volume: 10

Tank 4 Chemical: H2SO4+H2O2+DI

Temperature: 30

Volume: 10





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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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