Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Centris AdvantEdge G5 Mesa Poly

Asset ID: 208685

Print spec sheet

Applied Materials (AMAT)

Centris AdvantEdge G5 Mesa Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Chamber details:

Chm Position 1: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 2: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 3: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 4: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 5: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 6: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR

Chm Position 7: AxiSwll; Chemicals / Gases Used: H2, O2, N2

Chm Position 8: AxiSwll; Chemicals / Gases Used: H2, O2, N2


Remote Components

Cathode chiller:SMC-496 Qty 6/208 AC 3-Phase (Not include on tool sales)

Wall chiller:SMC-H2010 Qty 3/208 AC 3-Phase (Not include on tool sales)


STANDARD SPECIFICATIONS

Software Revision : B27243

FI Software: rel-2.11.0

GEM SEC Revision: 8.10.30.2

Wafer Size: Diameter 300+/-0.05mm(SEMI M28). 775+/-25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Load Port: 4 Loadports

Facility plate: N2 Regulator; Supplied by Micron in floor, CDA regulator 125 PSI on board SMC pressure switch

Loadlock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog

Transfer Pressure monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog

Transfer Pressure monitor: DCR PRESS ABS 1TORR 1/2FVCR 0-10V-OUT 9P-D .5%ACC

Signal Tower: Red/Yellow/Green/Blue(Front x1 and center section of loadside and maintenance side x1)DNET Light tower, 4 light cover (RAGV) w/CLR DAUG

EMO: Turn to Release (FI x3, Ch x6, AC x1) 3 on FI, 1 on each chamber, 1 on AC Box

Cable Length: HX Control Cable Length 100FT/ Heat Exchanger Hose Length 100FT/ Pump Cable Length 75FT/ Monitor 1 Cables 25 FEET WITH 16 FEET EFFECTIVE

Monitor: DUAL 17 IN FLAT PANEL WITH

KEYBOARD ON ERGO ARM/ REMOTE 17 IN FLAT PANEL ON

STAND

IPUP: BOC Edward iXL180 X2(1 for LL/1 for MF)


HARDWARE CONFIGURATION (Process chamber)

Chamber type: CENTRIS+ ADVANTEDGE G5M

Process kits: Y2O3/Al2O3/SiO2

Gas inject: Y2O3 Solid Nozzle

chamber O-ring: KALREZ

Turbo pump: BOC Edwards/ STP-XA3203CV

RF match: RF Match[RF MATCH, 13.56 MHZ, 8 KVP, 85 A, NAVIGATOR 3013, DPS 232] / RF Match[RF MATCH, 13.56 MHZ, 3 KV, 35 A, NAVIGATOR 1013-B20N, DPS 232]

RF generator: GEN RF 13.56MHZ 3KW APEX 3013 3 PHASE 208V / GEN RF 13.56MHZ 1.5KW APEX 1513 3 PHASE 208V

EPD windows: Quartz

CM Test port: 1/2 VCR Dual

RGA Port: none

Endpoint Type: Endpoint type (Eye-D)

Endpoint Wavelength 1: 200–800nm

Cathode Temperature Monitor: Yes

ESC Power Supply: POWER SUPPLY DC +2KV/-5KV 25W, 24VDC. ESC WITH LOOP COMPENSATION

RF Feed: By inductively coupled plasma source, the ion energy and ion density 

Liner: Y2O3 LINER


PROCESS GAS BOX CONFIGURATION (Process chamber)

Gas line 1: Gas line 1-O2 15 sccm GF-125

Gas line 2: Gas line 2-SF6 30 sccm GF-125

Gas line 3: Gas line 3-Heated C4F6 50 sccm GF-125

Gas line 4: Gas line 4-CF4 50 sccm GF-125

Gas line 5: Gas line 5-Cl2 100 sccm GF-125

Gas line 6: Gas line 6-HBr 100 sccm GF-125

Gas line 7: Gas line 7-SO2 100 sccm GF-125

Gas line 8: Gas line 8-CH2F2 100 sccm GF-125

Gas line 9: Gas line 9-SF6 200 sccm GF-125

Gas line 10: Gas line 10-Heated BCl3 200 sccm GF-125

Gas line 11: Gas line 11-HBr 600 sccm GF-125

Gas line 12: Gas line 12-CL2 600 sccm GF-125

Gas line 13: Gas line 13-O2 150 sccm GF-125

Gas line 14: Gas line 14-N2 200 sccm GF-125

Gas line 15: Gas line 15-CF4 300 sccm GF-125

Gas line 16: Gas line 16-CHF3 400 sccm GF-125

Gas line 17: Gas line 17-Ar 500 sccm GF-125

Gas line 18: Gas line 18-He 1000 sccm GF-125


PROCESS GAS BOX CONFIGURATION (Strip chamber)

Gas line 7: Gas line 7-N2 1000 sccm GF-125

Gas line 8: Gas line 8-O2 10000 sccm GF-125

Gas line 10: Gas line 10-H2/N2 5000 sccm GF-125


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.