Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

Tokyo Electron Ltd. (TEL) Tactras RLSA Poly

Disclaimer

The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.


Asset ID: 195204

Enquire about this product Print spec sheet

Tokyo Electron Ltd. (TEL)

Tactras RLSA Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2012-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available



Tool is cold down.

Inspect to confirm configuration and condition.

Configuration :

Tool can produce wafers as is.

All cables are present.

Process chamber type is RLSA Polye.

Signal Lamp Tower / Clean Room Manuals / Standard Manuals are included but Remote Service Monitors not included.


Process Kit Part Numbers :

Item Part Number

Vpper Wall 28002

Depo Shield 33005

Vpper Jacket 14014

Lower Jacket 13020

Exhaust Plate 22007

Shutter 32009

Shield(RLSA) Ring AA11OV1

Injector M876V2

Insulator B S320V1

Focus Ring Quartz 25584

Insulator A Quartz 06737

Dielectric Plate Dimple Quartz 34054

Shower Ring Quartz 16691


RLSA Chamber information :

ESC for wafer with Dual He Cooling

Nihon Koshuha Microwave Generator / Model is MKS 050B05 DL-PS


Turbo Pump Details : Position 2 SHIMADZU / Model is FT2301D

Generator Details : Position 2-Lower ADVANCED / Model is PARAMOUNT 3013

Process Chamber Roughing Pump is EDWARDS / Model is IXH30301

Cassette Chamber Pump is EDWARDS / Model is IXL120

Transfer Chamber Pump is EDWARDS / Model is IXL120

Chiller Details : THERMO CHILLER 3MC / Model is HRZ010-WS

Gas Box Configuration :

Gas Line Gas

1 H2

2 CH2F2

3 HBr

4 CL2




Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.