Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

ASM International Eagle-12 Rapidfire

Asset ID: 147997

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ASM International

Eagle-12 Rapidfire

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: August, 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available


Shipping brackets and kits will need to be supplied by buyer.

Buyer is responsible for arranging disassembly and rigging for tool.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


[Chamber A]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W


[Chamber B]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W


[Chamber C]

Process: P-TEOS

Hard: CVD

Gas(sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300)

RPU: 400kHz/3000W

HRF: 13.56MHz/1000W

LRF: 430kHz/1000W



Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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