Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

KLA-Tencor Corp. SpectraFX 200

Asset ID: 207532

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KLA-Tencor Corp.

SpectraFX 200

Film Thickness Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: 11/2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Vendor Tool Serial #  200611080760
Date of Tool Move-In  7-Aug-07
Tool Availability Date  29-Sep-07
Tool Current Status  In production / De-installed 
Tool working condition  Working / Not working with missing parts / Not working (Pls strike-off accordingly)
Tool Model  KLA+
Process  METROTHK
Software Version   
System Power Rating   208V 1-Phase
Loading Configuration  2 Load Ports
Any equipment manuals available?  Yes / No   
Tool under OEM service contract?   Yes / No  
* Letter of Declaration to confirm service contract coverage will be provided upon request
 DescriptionChemicals / Gases Used
Chm Position   1CDACDA 
Chm Position   2Vacuum SystemPV 


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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