Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

ReVera RVX1000

Asset ID: 200251

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ReVera

RVX1000

Film Thickness Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: November 13, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

Tool is still powered on and connected with facilities in clean room. It has stopped the operations.


Other missing parts: Not reported.

Damaged parts are reported as follows;

1. X-ray tube: The expiration date has passed and it is not surprising to leak water at any time. (WAS Used for 8 months)

2. DI cartridge: The replacement period has passed and the DI resistance value does not maintain the standard. (0.12 / 1.0MΩ)

Both the X-ray tube and the DI cartridge are not available for sale.

3. Rough pump also needs to be overhauled.


XPS measurement tool : inline non destructive analysis tool

No angle analysis function

X ray origin : MgKa

Spot size : 3*10mm

Standard throughput : 6wph (9 site)


The system has modeling and data analysis packaged included?: NO.

Pattern recognition function with fully automated navigation capability?: No.


X-ray, DI chiller, Rough pump an Turbo pump each has been turned off since April 2019.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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