Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 Exelan Flex

Asset ID: 211258

Enquire about this product Print spec sheet

LAM Research

2300 Exelan Flex

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: EXELAN

System Power Rating: 208 AC 3-Phase for system

Loading Configuration: 3 load ports


FI SN: 1017439-10-31-0744

PM 1 SN: 23EX-2536 (F128234-PM1)

PM 2 SN: 23EX-2537 (F128234-PM2)

PM 3 SN: 23EX-2538 (F128234-PM3)

PM 4 SN: 23EX-2539 (F128234-PM4)


Optional Gas

Gas1: C4F8, 50sccm

Gas2: C4F6, 100sccm

Gas3: CHF3, 100sccm

Gas4: CF4, 300sccm

Gas5: CF4, 1000sccm

Gas6: O2, 100sccm

Gas7: CH2F2, 100sccm

Gas8: 30%O2/He, 50sccm

Gas9: H2, 500sccm

Gas10: Ar, 1000sccm

Gas11: N2, 1500sccm

Gas12: O2, 3000sccm

Gas13: empty

Gas14: empty

Gas15: empty

Gas16: empty

TuningGas: 30%O2/He, 50sccm


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.