Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) Telius SP 305 DRM

Asset ID: 211216

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Tokyo Electron Ltd. (TEL)

Telius SP 305 DRM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool ModelTelius DRM  
ProcessOX  
Software VersionVer2.90-Rev011-VSTD3.30d  
System Power Rating 200V AC 3-Phase  
Loading Configuration4 Carrier Stage  
 DescriptionChemicals / Gases Used
Chm Position   1, 2, 3Telius_DRMAr/C4F8/O2/CF4/CHF3/CH2F2/N2/CO/CH3F
System Configuration   
DescriptionQty  
    
Loder Module1  
LoadPort Unit4  
LLM3  
PM3  
GAS BOX3  
RF Generator3  
TMP controller3  
AC Distribution BOX1  


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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