Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: July 2004
Currently Configured for: 200mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hsinchu, Taiwan
Available date: Currently Available
The equipment has been disassembled, please inspection the equipment to confirm the configuration and condition.
Manufacturer:Tokyo Electron Ltd. (TEL)
Model:UNITY ME 8555SSS
Install Type: SMIF
Software Version:Version 2.08-rev404-gem-5.54f
The system not On-Line.
All Cables are Present.
Etcher Mainframe Type is Unity Me.
Process Chamber (P/C)* 3
Directory of Etch Chamber Process is Oxide Etch.
Electrostatic Chuck Type is Ceramic
Chamber Process Kit Material is Quartz & Cerramic
Signal Lamp Tower:Include
Remote Service Monitors:Include
Process Kit Item(Part Number)
RING EXT OUTER(ES1805-220135-13)
Turbo Pump Details:EDWARDS A803
RF/Microwave Generator Details
Chamber Position Mfgr. Model
Position 1 – Lower RF DAIHEN WMN-30F
Position 1 – Upper RF (SCCM) DAIHEN AMN-30C11
Position 2 – Lower RF DAIHEN WMN-30F
Position 2 – Upper RF (SCCM) DAIHEN AMN-30C11
Position 3 – Lower RF DAIHEN WMN-30F
Position 3 – Upper RF (SCCM) DAIHEN AMN-30C11
Gas Box Configuration
Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model
1 H2 1000 崇翌科技 SEC-Z512MGXC
2 C4F8 30 崇翌科技 SEC-Z512MGXC
3 AR 100 崇翌科技 SEC-Z512MGXC
4 CF4 100 崇翌科技 SEC-Z512MGXC
5 CHF3 100 崇翌科技 SEC-Z512MGXC
6 CH2F2 30 崇翌科技 SEC-Z512MGXC
7 CO 150 崇翌科技 SEC-Z512MGXC
8 AR 1000 崇翌科技 SEC-Z512MGXC
9 O2 30 崇翌科技 SEC-Z512MGXC
10 O2 1000 崇翌科技 SEC-Z512MGXC
11 N2 300 崇翌科技 SEC-Z512MGXC
12 HE 1000 崇翌科技 SEC-Z512MGXC
Missing Parts for known
4.P1 top generator
5.Clean Room Manuals
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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