Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) Tactras Vigus

Asset ID: 12053

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Tokyo Electron Ltd. (TEL)

Tactras Vigus

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Jun., 2011

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 5/13/2022

OEM  TEL
Tool Model  Tactras-Vigus
Process  Oxide
Software Version (include revision #) Ver5.05-Rev502-STD-5.05a
System Power Rating  200 AC3-Phase for System
Loading Configuration  3 load port
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names) 
Chm/Unit Position   1  Loder Module-  
Chm/Unit Position   2  VTMN2  
Chm/Unit Position   3  Purge storage  
Chm/Unit Position   4  Process Module 1  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 
Chm/Unit Position   5  Process Module 2  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 
Chm/Unit Position   6  Process Module 3  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 
Chm/Unit Position   7  Process Module 4  (VIGUS-LK2)C4F8,C4F6,CH2F2,O2,CHF3,CF4,CO,N2,Ar,He,H2,CH3F,CO2PM4 is Vigus-LK2 chamber 
Chm/Unit Position   8  Process Module 5  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 
Chm/Unit Position   9  Process Module 6  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He 
Tool:    
Process Unit:  Model:Remark
Controller:  EC 
MFC/Pressure Unit:  FCS Device-net I/F Type (Fujikin)
SEC-Z514MGXCS15-14W3
CM1DNARETGAFKNV633 (MKS)
CM2
DMA11TGAEKNN633 (MKS)
PM1,2,3,5,6
PM4
Drive Mechanisms:  Yasukawa LMz軸、R軸、H1軸、H2軸、θACサーボモーター
TM
y(スライダ):ACサーボモーター
r
:DDモーター
 
FOUP Opener:  KWF-12C-T1(K-BL-601HAC1-SO-E)
Gas System:  1.125 inch 集積タイプ(CKD)
13 + 3(Edge-Add-Gas)
 
Exhuast System:  TMPTMP-W3503LMC(T4)(VG250)(SHIMADZU)
TM/LLM PUMPMU100U-147 (KASHIYAMA)
 

Fab15 confirmed there were no missing or damaged parts.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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