Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 Exelan Flex

Asset ID: 10791

Print spec sheet

LAM Research

2300 Exelan Flex

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: OX

Tool config is based on original PO, please verify tool details at tool inspection

FI SN: 101543506310528

Chamber SN: 23EX1593(F97589-PM1), 23EXF1594(F97589-PM2), 23EXF1595(F97589-PM3), 23EXF1751(F106896-PM1),

Standard Specs

Software Revision: 1.7.2 SP2 HF4 CST2

Factory Automation: OHT PIO Sensor

AMHS: AMHS - OHT or manual deliver - Factory Interface

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 3 carrier stage (Continuous flow operation)

Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)

Interface A: Hardware related to EDA Note: This is a cost option.

Small Wip Buffer FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assemblies

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Platform Type: Version 2

UPS on system: Yes

Earth Leakage Breaker: Yes (for Fab 3 only)

Gas Box: Transport Module, GIB for 16 lines IGS GBX

Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)

Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance 

side x1)

EMO: Front x2, Rear x6

Conditioning Station: No

Foreline: Not Heated

Sub-panel: Dual Drop Sub-panel

Interconnect Cables: TM to sub-panel, 50 ft

Pump to TCU: 50 ft

TCU to PM: 50 ft

PM to Pump Interconnect: 50 ft

Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)

Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed)

Support Remote Units

Chiller Lower: ATS DEX 20A

Coolant: FC3283

Chiller Hose: 5/8 ID Braided Stainless Flex

RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC

Wafer ID Reader: WIDS Bottom Read

Carrier ID Reader: Asyst RF Advantag

EIM Server: EIM Server-One EIM server per 8 frames

Hardware Config

Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)

25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM

Endpoint type: Optical Emission Spectroscopy

ESC type: Dual Zone/Flex Bipolar

Focus ring: Hot Edge, Si

High-conductance Wap Ring: 4 Ring

Gap: 2.34 cm


Dry Pump: IH600 (EDWARDS) ; Customer Supply

Transfer Module Backing Pump: EPX with N2 Gas Module

Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr

Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr

Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr

Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001

Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14

Upper Electrode: Heated Constant Temperature Control

Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode

O-Rings: FluoroSilicone

Chamber Isolation Valve: Barrier Seal Door

Wafer Lift Mechanism: Direct Drive

Gas Position

Gas line 1-C4F8 50 sccm- AERA FC-D780CU

Gas line 2-O2 50 sccm- AERA FC-D780CU

Gas line 3-CHF3 100 sccm-AERA FC-D780CU

Gas line 4-CF4 200 sccm-AERA FC-D780CU

Gas line 5-30% O2/HE 100 sccm-AERA FC-D780CU

Gas line 6-C4F6 50 sccm- AERA FC-D780CU

Gas line 7-CH2F2 50 sccm-AERA FC-D780CU

Gas line 8-CF4 1000 sccm- AERA FC-D780CU

Gas line 9-H2 1500 sccm- AERA FC-D780CU

Gas line 10-AR 1000 sccm- AERA FC-D780CU

Gas line 11-N2 1000 sccm- AERA FC-D780CU

Gas line 12-O2 3000 sccm- AERA FC-D780CU

Tuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU

Gas Box Config

Purge: N2 (Process Grade N2) (Customer Supplied)

Filter: Final gas : Mykrolis (P/N WG2FT1RR2)

Gas Box Inlet Option: Regulated Inlet Gas Panel

Non-standard PM/GB Feature: Enhanced gas box with 12 gas lines.

Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout


Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)

Final Pressure Switch: Absolute Pre

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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