Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

KLA-Tencor Corp. 2920

Asset ID: 12764

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KLA-Tencor Corp.

2920

Brightfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: Dec 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: 6/23/2021

1.    Model D6

1.    1 * Model, D6

2.    1 * D6h

3.    1 * DFIMS, Phoenix v2.0, VQ

4.    1 * PHX Ship Kit

5.    1 * Line Cond. 75kVA, EL

6.    1* 25 cassette HW, 300mm SW

7.    1* 300mm: DSW 065, Haze, Shiny

8.    1 * Monitoring Gauge Phoenix

9.    1 * GEM/SECS and HSMS

- Software that controls communication between Equipment and customer host system (High Speed Messaging System)

10.  1 * E84 Enablement for OHT with Cables

- Tool software that controls the transfer of carriers (FOUPs) from an Overhead Track (OHT) system to a tool

- Used in conjunction with Hokuyo PI/O devices

- Includes standard 5-meter cables only, but if OHT Hokuyo PI/O devices re required, E84 OHT w/PIO, PHX, DFIMS, DMG should be selected instead

- Intended for use with Phoenix handler

11.  1 * E87 Carrier Management Services, E39 Object Services and E90 Substrate tracking

-Tool software that manages automated and manual carrier (FOUP) transfers to and from the equipment

-Includes Substrate Tracking (E90) and Object Services (E39) E40 Process Job Management and E94 Control Job Management

-Tool software that manages Process Jobs (E40) and Control Jobs (E94 based on E39)

12.  1 * Two Omron Radio Frequency (RF) Carrier ID Readers

-Identifies the name of the carrier (FOUP)

-Intended for use with Phoenix handler and Shinko loadports

-Uses the Omron V640 V3-2 RF ID Reader

-One reader required for each FOUP loadport

13.  1 * Painted Panel Light Curtain with Safety Skirt for Dual FIMS

-Safety skirt is a physical barrier that prevents bodily harm to an operator during FOUP delivery or pick-up at the tool.

-Light curtain adds an emitter and a transceiver to the front of the EFEM and when broken by an operator, it will stop any ongoing FOUP transfer from an OHT.

-Intended for use with DualFIMS Phoenix handler and Isoport loadports.

-Only one Light Curtain and Safety Skirt required per tool

14.  1 * Small Pixel,36,50,65 nm

15.  1 * Microtool AM-3005 (single)

16.  1 * Dual Loadport Info Pad Kit

17.  1 * G4 FIMS Ionization

18.  1 * Opt,DF,Loadport Gasketing,SCE

19.  1 * Opt,Swagelok Fittings

20.  1 * 20m EMO FAC PNL to LC Cable,EL

21.  1 * 20m Main Power Cable, EL

22.  1 * FDC

23.  1 * TBD

24.  1 * IDA

25.  1 * Simulator

26.  1 * Impact

27.  1* Remote Control Client

 

1 * OPT, SIG TWR,40MM, RYGB,PHX PUMA

1 * OPT, REMOTE CONV, BLOWER, EL

1 * OPT, SW, SIXTEENTH SPEED

1 * OPT, EXTERNAL CABLES, STANDARD, EL

1 * OPT, UPGRD, DBB,4U,IDA

1 * OPT, CA-GENERATOR, XP

1 * OPT, SIMULATOR

1 * OPT, SW,RBS

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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