Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Dainippon Screen Mfg. Co. FC-3100

Asset ID: 207526

Print spec sheet

Dainippon Screen Mfg. Co.

FC-3100

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Tool Model  FC-3100  
Process  ADDSC1  
Software Version  FC31-23.0A006  
System Power Rating   208 AC 3 Phase for System(eg. 110 AC 3-Phase for System)
Loading Configuration  2 Load Ports(eg. 6 load positions for furnace or dual auto-indexer loaders)
   DescriptionChemicals / Gases Used
Tank 1  CHBTMAH/APM 
Tank 2  ONBHF, NH4OH, H2O2
Tank 3  CHBTMAH/APM 
Tank 4  ONBHF, NH4OH, H2O2
Dryer 1  LPDHF, IPA, N2 
Dryer 2  LPDHF, IPA, N2 


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