Accretech/TSK UF3000

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

PROBE TCP-3ACCR_16PINC1D TSK UF3000 Final Probe

Tool config is based on original PO, please verify tool details at tool inspection

External Chiller Unit: No

Loader Type: TSK

Number of Loaders: 1

Cassette ID Reader: Yes

Chuck Size: 12"

Chuck Top Material: NICKEL

Low Temp Chuck: NO

Chuck Temperature Range: ~150℃

Temperature Unified Chuck Option: Type: ARTS-LC12

Low Noise Chuck Option: No

External Chiller Unit: No

High Force Z Drive: No

Auto Probe to Pad Alignment: Yes

Needle Mark Inspection: Yes

Fail Mark Inspection: Yes

Surface Wafer ID OCR: Yes

Wafer ID Barcode Reader: No

Needle Cleaning Option (Double Brush): No

Auto Needle Height and Align: Yes

Soak Time Option: Yes

Probe Card Changer: Yes

3-64 Multi-site Probing: 1~1024

GPIB Interface: Yes

RS232 Interface: Yes

RF Tag: No

Software Version: NA

Boot ROM Version: P/C unit no.: ACCT-072

User ID / Password: Default

Integrated Printer: No

Manipulator: MHF6000

Test System Interface: MICRON SIG C1D

Manual Set: No

Damage/Missing parts list

Please inspect tool to reconfirm

customer provided items not included on sales

UF3000 Standard Feature

Overall Accuracy Within 2 µm

Wafer Size 8", 12"

X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)

X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s

Z axis Full Stroke 37 mm

Z axis Maximum Speed 30 mm/s

θ axis Rotation Range ±5 deg.

Fine Alignment CCD ITV Image Processing

Loader Cassette Mounts 1 (2nd cassette with option)

Loader Wafer Handling Robot Arm / Backside Holding

Hard Disk 3.5" 20GB (1 unit standard)

Floppy Disk 3.5" 2HD / 2DD (1 unit standard)

MO 230 / 540MB (1 unit standard)

Display 12.1" TFT Color LCD

Power Consumption Less than 2kVA

Air Supply Source Pressure 0.6 MPa or more

Air Supply Consumption Approximately 0.1 liters / wafer

Vacuum Supply Less than -80 kPa, 30 liters / minute

Dimensions 1508W × 1587D × 987 H mm

Weight 1500 kg (Standard)