Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Accretech/TSK UF3000

Asset ID: 207211

Print spec sheet

Accretech/TSK

UF3000

Production Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

PROBE TCP-3ACCR_16PINC1D TSK UF3000 Final Probe


Tool config is based on original PO, please verify tool details at tool inspection


External Chiller Unit: No


Loader Type: TSK

Number of Loaders: 1

Cassette ID Reader: Yes

Chuck Size: 12"

Chuck Top Material: NICKEL

Low Temp Chuck: NO

Chuck Temperature Range: ~150℃

Temperature Unified Chuck Option: Type: ARTS-LC12

Low Noise Chuck Option: No

External Chiller Unit: No

High Force Z Drive: No

Auto Probe to Pad Alignment: Yes

Needle Mark Inspection: Yes

Fail Mark Inspection: Yes

Surface Wafer ID OCR: Yes

Wafer ID Barcode Reader: No

Needle Cleaning Option (Double Brush): No

Auto Needle Height and Align: Yes

Soak Time Option: Yes

Probe Card Changer: Yes

3-64 Multi-site Probing: 1~1024

GPIB Interface: Yes

RS232 Interface: Yes

RF Tag: No

Software Version: NA

Boot ROM Version: P/C unit no.: ACCT-072

User ID / Password: Default

Integrated Printer: No

Manipulator: MHF6000

Test System Interface: MICRON SIG C1D

Manual Set: No


Damage/Missing parts list

Please inspect tool to reconfirm

customer provided items not included on sales


UF3000 Standard Feature

Overall Accuracy Within 2 µm

Wafer Size 8", 12"

X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)

X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s

Z axis Full Stroke 37 mm

Z axis Maximum Speed 30 mm/s

θ axis Rotation Range ±5 deg.

Fine Alignment CCD ITV Image Processing

Loader Cassette Mounts 1 (2nd cassette with option)

Loader Wafer Handling Robot Arm / Backside Holding

Hard Disk 3.5" 20GB (1 unit standard)

Floppy Disk 3.5" 2HD / 2DD (1 unit standard)

MO 230 / 540MB (1 unit standard)

Display 12.1" TFT Color LCD

Power Consumption Less than 2kVA

Air Supply Source Pressure 0.6 MPa or more

Air Supply Consumption Approximately 0.1 liters / wafer

Vacuum Supply Less than -80 kPa, 30 liters / minute

Dimensions 1508W × 1587D × 987 H mm

Weight 1500 kg (Standard)

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.