Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
WCVD (Chemical Vapor Deposition)
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: LRW
From original tool PO, please inspect to verify
Process: 4200-60 CONTACT W DEP
Software Version: 5.86B150P2
System Power Rating : 208 AC 3-Phase
Loading Configuration: 3load port(Brooks)
Chm Position 1: C3 ALTUS CHA- Chemicals / Gases Used Ar/SiH4/H2/WF6/NF3/B2H6
Chm Position 2: C3 ALTUS CHB-Chemicals / Gases Used Ar/SiH4/H2/WF6/NF3/B2H6
Facility & Interface
Altus Module Locations: Dual
WTS(backbone) Facilities Connection Configuration: Bottom Facilities Installation
Remote Interconnect Cables: 75 feet
4 Color Flush Mount Signal Tower: 34-291897-04
Factory Automation Interface (Over Head Transport), [E84 AMHS Protocal]: E84 controller 02-321482-00 /E84 cable 03-160683-00
WTS Frame: 3 FOUP, IMM, F47
2 FOUP or 3 FOUP Front End Interface: 3 FOUP
Fixload FOUP RF ID Reader: READER,RFID,OMRON V640-HS61 27-327806-00
Fixload Firmware: Rev 2.9
Remote Back End User Interface (Ergotron): 04-346723-00
Primary Front End User Interface Position: Right
Modular Power Distribution, [MPD,DUAL, ALTUS,C3PDP]: 01-296434-03
Front End (backbone)
ATM Robot Kit (Traverser, Robot, Controller), [Reliance]: Traverser 02-320123-00/Robot 02-343723-00/Controller 02-343877-00
ATM Robot Firmware (for friction end effector): 1.47
ATM Robot End Effector (Friction Type): 15-360099-01
Transfer Module Robot With Leapfrong Armset, [Mag7]: DRIVE UNIT 27-355276-00/Arm set 63-263892-00
Transfer Module to Chamber Valve (SMC Valve): 63-294083-02
Cooling Pedestals in Loadlocks: 02-307891-01 Right, 02-307891-02 Left
Throttle Valve, WTS: 60-100802-00
Loadlock ATM Gate Valve, VAT: 63-328046-00
Loadlock Vacuum Gate Valve, VAT: 60-309252-00
Leak check shut-off valve (attach to existing KF-40): 04-110786-00
Readiness Kit (If ordered as a single Altus): NA
Mini Environment AWC: Installed
Transfer Module AWC (LED), [SENSOR XMITTER/SNS RECIEVER]: 03-257256-00\03-257257-00
IMM Ready (IMM Mount, cabling, 17" UI, Traverser, etc): NO
Software/Controls
Module Controller Type: 02-321865-00
System Controller Type: 61-311719-00
System Software (Proteus): 2.653 B24
System Software (QNX): 5.83 B22
WTS IOC: Firmware
0: HDESIOC/1.309
1: N/A
E84/AWC: HDESIOC/1.407
Altus IOC: Firmware
0: ESIOC Firmware 1.309
1: ESIOC Firmware 1.309
2: ESIOC Firmware 1.309
Chase UI Computer: 04-346723-00
Windows Version: Windows 2000
Process Chamber Configuration
Shower Heads: 16-289070-00
Pedestal Position #1-#4 (ASSY, PED,300MM WCVD,PREHEAT): 16-341152-00
MOER Rings 2.25mm: 02-344085-02
Remote Plasma Clean(Generator, 4L, Astron): 27-261291-00
Indexer Plate, HUB: 15-100082-00
Indexer Plate, Upper Assembly: 15-046309-00
Spindle Assembly: 02-347420-00
IR Endpoint Detector, Kit: 27-304149-00
Leak Check Shutoff Valve for Process Module: 60-268274-00
ASSY,HOLDER,CARRIER RING,300MM,C3 ALTUS: 02-332440-00
Throttle Valve MKS (Pressure Control Valve): 60-174047-00
Throttle Valve MKS (Controller/Firmware): 27-325180-00
Gate Valve, L-Motion, SMC: 63-294083-02
KIT,SYMM FORELINE & EXHAUST,C3ALT: 04-363404-00
Gas Box Configuration:
Micron Special: All Digital MFC with Gas Interface: B2H6 PA type , others are PI type
ALD valves: ALD Valves
Slot: Gas
A & B Manifold:
3: PI-98 H2 / 30 SLM
4: PI-98 Ar / 20 SLM
I: PI-98 NF3 / 5 SLM
D Manifold:
1: PI-98 Ar / 5 SLM
2: PI-98 SiH4 /500 SCCM
N: FC-PA7800C B2H6 /500 SCCM
H Manifold:
D: PI-98 Ar/20 SLM
W Manifold:
5: PI-98 WF6/500 SCCM
C Manifold:
8: PI-98 Ar/10 SLM
9: PI-98 H2 / 30 SLM
J Manifold:
E: PI-98 WF6/500 SCCM
K Manifold:
G: PI-98 SiH4 /500 SCCM
F: PI-98 Ar/5 SLM
X: FC-PA7800C B2H6 /750 SCCM
Ar Carrier Manifold:
C: PI-98 Ar / 20 SLM
M: PI-98 Ar / 20 SLM
M Manifold:
J: PI-98 WF6/500 SCCM
N Manifold:
K: PI-98 WF6/500 SCCM
F Manifold:
P: PI-98 Ar / 20 SLM
Baratron
Altus, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
Altus, CAP MANOMETER,HEATED 10 TOR: 27-10343-00
Altus, Backside, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
WTS, Loadlock, MANOMETER,100T,MKS,750B,DSUB: 27-126439-00
WTS, TM, CAP MANOMETER,HEATED 100 TORR: 27-10340-00
SUPPORTING REMOTE UNITS
One Process Pump per process chamber, will be provided by ordering Fab: IH1800SC
One Pedestal pump per process chamber, will be provided by ordering Fab: ADS 1202H
One WF6 divert pump per system, will be provided by ordering Fab: divert to process pump
One sih4/b2h6 divert pump per system, will be provided by ordering Fab: divert to pedestal pump
One TM pump per system, will be provided by ordering Fab: ADS 602LM
One LL pump per system, will be provided by ordering Fab: ADS 602LM
heated foreline to pump:
heated exhaust to guardian: installed but turned off
One LL pump per system, will be provided by ordering Fab:
heated foreline to pump: NA
heated exhaust to guardian:
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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