Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY

Asset ID: 31238

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELINDY

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available



Configuration. Audit to verify.


Vertical MLD AlO/HfO TELINDY-B for 300mm Wafers 1.Base Unit for AlO/HfO MLD Process.

  Including:

 Cabinets / Units / Controllers Included

- Furnace Cabinet' (With Scavenger)

- Power Supply Unit (U/P Box)

(Including Control Unit, Transformers, SCR, and Breaker Unit)

- Main Controller (WAVES)

- Temperature Controller

- CAssette and Wafer Handling Automation Included

- Auto Tube Shutter

- Boat Elevator w/Boat Rotation Mechanism

- Wafer Load Automation

- Load Port System

- Cassette Load Automation

- 16 FOUP Stocker

- US Safety (S2-0302,S8-0999)


 MLD AlO/HfO Specific Options


- Integrated Gas System for AlO/HfO Process   1 Included)

- Purge N2 (gas line)

- TEL made bubbler unit for TDMAH precursors

- TEL made bubbler unit for TMA precursor

- Ozonizer unit

- N2 Load Lock Option                1 Included

- O2 Analyzer - NGK SH-304

- N2 Gas System

- Low Temperature heater with RCU (VMM-56-201)

- Vacuum foreline configuration with stainless steel

 manifold.

- Including normal temp Vacuum Gage

- Dual Boat Operation                1 Included

- Optional Gas Box


- Smoke detector and signal interface (dry contact)

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.