Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Electric Co., Ltd Quixace II Nitride

Asset ID: 19642

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Kokusai Electric Co., Ltd

Quixace II Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available


Process: NITR

Furnace Unit        
Cartridge Heater:D4EX30445-RHC-2 
T/C for Heater Control:D4EX15442    
T/C for Sub Heater Control:D4EX30655    
T/C for Over temperature Protection:D4EX15442    
5-P T/C for Cascade Control:D4EX22994-L Type
5-P T/C for Profile Control:OPTION
1-P T/C for Profile Control:D4EX21001-OPTION 

Clean Unit        
Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)
Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)
Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)

Controller        
Main Controller(OU):D4EX35757(CX5000)    
Main Operation Unit:TM150-HKT02    
Sub Operation Unit:KDSC-2005SUBDISP    
Process Module Controller:D4EX43195(PMC5000)    
DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit
Gate Drive Unit:D4EX36969(DN-150VR-T5)    
MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote
FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit
Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit
Valve / Interlock Control Unit    CJ1G-CPU43H-Made by Omron
Switching HUB:FL SWITCH SFN 8TX    
Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green
Signal Tower (Rear)
Signal Tower (Pump)
Gas Flow Pattern Panel:D7EX40367
EDA Controller:D4EX38401 (EDA)
EDA Operation Unit:TM150-HKT02

Drive Mechanisms    
I/O Shutter    
AGV/PGV/OHT Stage    
FOUP Loader    
Rotation FOUP Storage: FOUP receipt number : 16
FOUP Opener:2 Ports
Wafer Detection:25 in one lot.
Wafer Transfer:Lift Transfer
Variable Wafer Pitch Converter    
Boat Elevator    
Boat Changer    
Furnace Port Shutter    
Boat Rotation    
Broken Wafer Detector:OPTION
Wafer Transfer Crash Detector:OPTION
Tweezer Pitch check mechanism:OPTION

Gas System    
Gas Unit(IGS):SiH2Cl2, NH3, NF3
Tape Heater for gas pipe:SiH2Cl2 Line

Exhaust System        
Dry Pump& Mechanical Booster Pump:IH1800-HTX-Made by EDWARDS/Prepared By
User
Diaphragm Sensor (1000Torr):631C13T8FH,Made by MKS
Diaphragm Sensor (2Torr):631C02T8FH,Made by MKS
Diaphragm Sensor (10Torr):722B11TCE2FA,Made by MKS
ATM SENSOR:"PA830 102G(SENSOR)
, PZ200(DISPLAY)"-"Made by COPAL
Main Valve:VEC-R-V80B0W2-400H,Made by CKD
Exhaust Piping
Exhaust Dilution Line
Reactor Tube Press Leak Line
Back Ground Line:SiH2Cl2, NH3, NF3
Jacket Heater for exhaust pipe:D4EX32782,Made by MKS
Seal Cap Heater    :SH-13049-02,Made by SHINWA VANES
Inlet Flange heater:D7EF78958,Made by TOKYO GIKEN
Inlet Port heater:ESH-12965-02, 
ESH-12966-01,Made by SHINWA VANES
Cold Trap

Safety        
Light Curtain System:SL-C52H, Made by KEYENCE
Gas Detector (NH3 Indicator/Detector):GD-K71D-R(NH3/75PPM), Made by Riken Keiki
Gas Detector (NF3 Indicator/Detector):GD-K77DG(NF3/30PPM), Made by Riken Keiki
Gas Detector
(SIH2CL2 Indicator/Detector): GD-K71D-R
(SIH2CL2/15PPM), Made by Riken Keiki

Other        
AGV I/F UNIT: OPTION
OHT I/F UNIT:DMS-HB1-Z, Made by HOKUYO
CIDRW CONTROLLER: V700-L22-5,Made by OMRON
AMPLIFIER UNIT: V640-HAM12, Made by OMRON
CIDRW HEAD: V640-HS62,Made by OMRON
CHEMICAL FILTER-Made by TOAMEC

N2 Purge Load Lock System        
O2 Monitor / Detector:TF-21D201(RX-105063-A),Made by Energy Support
FOUP Opener N2 Purge SYSTEM, Made by Hitachi Kokusai
Loading Area MFC:HM5143B20AR, Made by Tokyo Keiso
Loading Area N2 Purge Line- Made by Hitachi Kokusai
FOUP Opener N2 Purge Line- Made by Hitachi Kokusai


Missing/Damaged Parts List:
None report, please inspect tool to reconfirm
 

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