Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Configuration. Audit to verify.
Zestone Model DJ-1223V (Z-3CN), 300mm Reactor, Dual Boat, One Reactor Configuration for DCS/NH3 Nitride (Si3N4).
Base System Includes:
Boat Rotation
UPS (AC 120V)
SEMI S2-0200E Compliance
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Options: RHC Upgrade/1 Tubes (Rapid Heating Canister) Best 30degC UP/ 20degC Down
Rear Operation Panel
Hard Gas Pattern Panel (2 pcs)
NF3 Self-cleaning for Nitride
HPM (Toxic Gas) Interlock
POD ID Reader including software
Keyence POD ID Price Delta (compared to Asyst)
OHT Capability
Exhaust APC
Boat Rotation with NH3 Purge avoid attaching bi-product for Nitride
Inlet Heater
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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