Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. TELFORMULA ALD High-K

Asset ID: 11920

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Tokyo Electron Ltd.

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: Jul. 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 5/21/2021

A Hard Disk Drive will be removed from tool.

Other missing or damaged parts: Not reported.


Tube Material:Quartz

Boat Material:Quartz

Production wafes:50

Pressure control:APC Valve 

Process Gas:ZAC(F.S:0.5sccm×2),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,ZAC)

Vaporizer TYPE:LSC-F530(TMA),TL-2014(ZAC)×2 (Dual Vaporizer)

MFC Maker:STEC

MFC Model:Z500series

Process Temp:200-300deg


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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