Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. TELFORMULA ALD High-K

Asset ID: 11920

Print spec sheet

Tokyo Electron Ltd.


Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: Jul. 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 5/21/2021

A Hard Disk Drive will be removed from tool.

Other missing or damaged parts: Not reported.

Tube Material:Quartz

Boat Material:Quartz

Production wafes:50

Pressure control:APC Valve 

Process Gas:ZAC(F.S:0.5sccm×2),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,ZAC)

Vaporizer TYPE:LSC-F530(TMA),TL-2014(ZAC)×2 (Dual Vaporizer)


MFC Model:Z500series

Process Temp:200-300deg

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