Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Aviza Technology, Inc. RVP-300 Anneal

Asset ID: 11784

Print spec sheet

Aviza Technology, Inc.

RVP-300 Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: ANNEAL

Tool config is based on original PO, please verify tool details at tool inspection

System, General Specification

Heater element Model   FURNACE,ATM -APL

Process Condition   AP

Maximum Operating Temperature   1200c

N2 Load Lock   Yes

Wafer Type   300 SEMI STD-Notch

Qty. of Production Wafers   120 slots Ladder

Boat Operation   2 Boat Type

Software Version   AVP 2.7.1 V

System, Furnace

Loading Area Light   White   2

Force Air Cooiling system   installed   1

Side Maintenance   None   None

O2 Density control   0-100ppm   1

N2 Boat shower wafer cooling   None   1

Furnace Temperature Controller   SSPC control   9

System, Wafer/Carrier Handling

Carrier Type   12" FOUP

Carrier Stage Capacity   16 FOUP

WTU Type   GenMark

WTU alignment   GenMark

WTU Teaching method   Pre-aligner / dual beam

System, Gas Distribution

IGS Maker / Type   Fujikin

IGS MFC Maker / Type   AERA

IGS Press Transducer Maker / Type   Mykrolis

System, Exhaust Specification   

Vacuum Gage - 2 torr   AP tool 

Vacuum Gage - 10 torr   AP tool 

Vacuum Gage - 100 torr   AP tool 

Vacuum Gage - 1000 torr   AP tool 

Main Valve   AP tool 

Pump Maker/Model   AP tool 

Low vacuum valve   AP tool 

Trap   AP tool 

Vacuum Pressure Controller   AP tool 

System, Reactor   

Process Tube (LP)   None

Outer/Inner Tube Material (LP)   None

Inner Tube Type (AP)   Quartz Single


Boat Materail/Type   Sic

Boat Rotation   None

Pedestal Materail/Type   Quartz

Auto Shutter   installed

System, Power Distribution   

Voltage 3phase   480VAC

Voltage Single-phase   None

Frequency   60Hz 

System, User Interface   

Operation Panel   Keyboard & Screen

Indicator Type   Mouse

Operation software type   Linux

Gas Leak Detector   

Gas Leak Detector Materail/Type   GasTech

System, Fixture List, Gas   

IGS maintenance Fixture   None

Vacuum Gauge   None

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.