Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 2/3/2023
|Tool Model||Kiyo EX e5|
|System Power Rating||200 AC 3-Phase|
|Loading Configuration||4 load ports|
|Tool under OEM service contract?||Yes|
|Chamber Description||Chamber Chemicals Gases Used|
|Chamber PM1, PM2, PM3, PM4, PM5||Kiyo EX||SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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