Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300e4 KIYO EX

Asset ID: 211055

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LAM Research

2300e4 KIYO EX

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2012

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: KIYO E series (V2 platform)

Process: Poly

Software Version (include revision #): 1.8.4 SP11-HF5

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 Load ports


Chm/Unit Position 1: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2

Chm/Unit Position 2: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2

Chm/Unit Position 3: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2

Chm/Unit Position 4: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2


2300 System

2300 E4: 2300 e4

Wafer Size: 300 mm wafers

Wafer Config: SEMI

Cassette Type: 25 Slot Cassette

Process Module Position and Quantity: 2300 Versys Kiyo E Series (PM1,2,3,4)

Gas Box Type: IGS


2300 Process Module

Chamber Type: Versys Kiyo E Series


2300 Versys Kiyo E Series

Chamber Options: PTK

Window: Temperature Controlled Window

Window Type: HP Crystal Window (-868)

Injector : Coated Ceramic Injector (-213)

Injector Shield : Standard Bayonet Style

Gas Weldment: Coated (-807)

Injector Shield: Standard Injector Shield

Plasma Screen: Enhanced (-035)

Gas Weldment: Original (-103)

Liner: SRC Enhanced Grounded (-866)

Gas Feed: Top & Side

TCP Source: Continuous Plasma 2000W

TCP Coil Support: Enhanced

Bias Match: 1.5kW HVBP Sync

Electrostatic Chuck: EPX ERMZ (-611) - ESC

ESC Facility Plate: Comp Fac Pl With Routing

ESC Hose Kit: Low Temp

Wafer Lift Mechanism: Prime Movers

Voltage Control Interface: 1200V Pulsed Compatible

High Bias Kit: Yes

Edge Ring: Single Piece Quartz

300MM Turbo Pump: 2700 L/s BOCE

Endpoint Detection: OES2 Sync

Chamber Viewport Window: Standard

High Speed Data Acquisition: No

Heated Foreline Clamp Cover: Yes

Chamber Isolation Valve: Barrier Seal Door

Vacuum Valve: Viton

Lower Isolation Valve: Valqua (-009)

Chamber Manometer: Alternate (-011)

Chamber Manometer Filter: None

He UPC: Enhanced

Water Control: Passive RF PCW Control

PCW Hoses: Chemical Resistant

Exhaust Duct: Reduced Profile (-402)

Service Covers: Standard

Pump to TCU: Pump to TCU, 50ft

TCU to PM: TCU to PM, 100ft

PM to Pump Interconnect: Pump to PM, 100ft

TCU to RPDB: TCU to RPDB, 25ft

Pump to RPDB: Pump to RPDB, 25ft

Non-Standard PM Feature: NSR101590,Replace -658 ring w/-662 Combo; NSR101555, Replace Crystal window w/-833; NSR101260,Add 4ea,-111e-seals f-611 esc; NSR102453,Replace-009VIOPIIIPCBw-010EX


Gas System (JetStream)

Mounting Location: Transport Module

Door: Window

Primary Valve Options: Lock-Out Tag-out Manual Valve

Facility Box Connection: Top Gas Connection

Facility Box Containment: Standard Containment

Facility Box Regulation: Regulated with Filter

Facility Box Filter: Standard Filter

Future PM: Position 1, 2, 3, 4


2302 Kiyo E Series JetStream Gas Box Options

Heated Gas Lines: Heated Lines, Pos 1 & 2

Gas Line 1: MFC, SiCl4 100 SCCM

Gas Line 2: MFC, Cl2 500 SCCM

Gas Line 3: MFC, HBr 500 SCCM

Gas Line 4: MFC, CF4 400 SCCM

Gas Line 5: MFC, BCl3,200 SCCM

Gas Line 6: MFC, He 500 SCCM

Gas Line 7: MFC, CH2F2 200 SCCM

Gas Line 8: MFC, Ar 1000 SCCM

Gas Line 9: MFC, 30%O2/He 50 SCCM

Gas Line 10: MFC, NF3 1000 SCCM

Gas Line 11: MFC, N2 (Process Grade) 250 SCCM

Gas Line 12: MFC,SO2,200 SCCM

Gas Line 13: MFC, SF6 200 SCCM

Gas Line 14: MFC,CHF3,200 SCCM

Gas Line 15: MFC, O2 500 SCCM

Gas Line 16: not use

Tuning Gas1: not use

Side He Ballast: MFC, He 200 SCCM


Gas Box Configuration

Gas Box Inlet Option: Regulated Inlet Gas Panel


2300 Platform

ATM, Factory Automation: OHT PIO Sensor

ATM Input Buffer Station: 25 Slot

ATM, CTC Computer, Storage: Hard Disk Drive - Mirrored

VTM Loadlock A: Standard

VTM Loadlock B: Standard

Subpanel: RPDB

Signal Tower: R-O-G-B Signal Tower


Pre-Facilities

RPDB: Backing Pump CB Sizes: 40A

RPDB: TCU CB Sizes: 40A


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


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