Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials Producer GT Eterna FCVD

Asset ID: 54009

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Applied Materials

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


Tool is config with ETERNA TWIN Chamber A & ETERNA2 UV cure TWIN Chamber B & ETERNA TWIN Chamber C


Basic System 

Technology: DCVD

Platform Type: Producer GT

Process: FUV

System Power Rating: 208/480 AC 3-Phase

Loading Configuration: 3 SELOP 7 25 WAFER FOUP (LOADPORT)


Tool Specific Information

ETERNA TWIN CHM A Chemicals/ Gases Used: NH3_SIDE2, NF3, AR_CLN, O2_LOW, O2_CLN, TSA, HE, NH3_SIDE1, H2O, AR_H2O

ETERNA2 UV cure TWIN CHM B Chemicals/ Gases Used: AR_TOP, AR_SH, AR_BTM, NF3, AR_CLN, O3

ETERNA TWIN CHM CChemicals/ Gases Used: NH3_SIDE2, NF3, AR_CLN, O2_LOW, O2_CLN, TSA, HE, NH3_SIDE1, H2O, AR_H2O

Load Port Types SELOP 7 25 WAFER FOUP

WIP Delivery Type OHT WIP DELIVERY

iPUP One iPUP for loadlock chambers 

Local Center Finder

RPS Astron 6L RPS


Remote Components (REFERENCE ONLY)

Heat Exchanger SMC H2000(INR-498-012C): 2

SMC Chiller -20 (0190-32036):1

TSA/Purge N2/CO2 Cabinet: 2 set

UV Curing System and UV AC Rack: 1 set

O3 Generator: 1

Process Vacuum Pump CHA/C:Edwards iXH4550HT, CHB: Edwards iXH1820: 3

Buffer pump Edwards IH600L: 1

DAS escape Scrubber: 2


Damage/Missing parts list

Process Vacuum pump: CHA/C:Edwards iXH4550HT(Qty:2), CHB: Edwards iXH1820(Qty:1)

Buffer pump:Edwards IH600L(Qty:1)

Scrubber: DAS escape Scrubber (Qty:2)

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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