Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT APF

Asset ID: 13770

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Applied Materials (AMAT)

Producer GT APF

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: AC_SR

Software Version: B5.4.135

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 SELOP 7 25 WAFER FOUP (LOADPORT)


Chm/Unit Position 1: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2

Chm/Unit Position 2: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2

Chm/Unit Position 3: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2


Technology: DCVD

Platform Type: PRODUCER GT

System software: B5.4.135

FiCGUI: fB5.20_11

GP: 8.10.21.2

DTauMacros: 9.2.44.0

Mainframe Configuration: 

Robot Blades: Ceramic (0200-08346)

LL preheater: 0090-04659

slit valve door: 9992-00594

MF pump: Edwards IH 600

LL pump: Onboard pump BOC EPX Load lock and Transfer chamber shared pump

Diffucer: 4020-00050


Chamber Configuration

Chamber Type: APF-x 

RF Generator: GEN RF 13.56MHZ 3KW 3PHASE 208VAC 2PIN 0920-00139

Heater: 0010-59787

Slit Valve: 9992-00594

RF Filter: 0090-04947

Foreline TV/ISO: 0195-07685(COMBO)

RPS: N/A

Aligner producer GT 5.4 FI: 0240-54030

Pin lifts and integration, common producer SE/GT: 0246-03110

Gas Box: Bypass GAS BOX 0041-28308

Blocker,APF,300mm Producer : 0020-63185

Faceplate,APF,300mm Producer G: 0020-49785

Isolator,Ceramic,CVD Low K,300mm Producer SE/GT: 0200-01427

Assembly,side LC match,left ,2700PF,APF,producer : 0090-06021

Assembly,side LC match,right ,2700PF,APF,producer : 0090-06022

Filler Chamber 1 APF Producer SE/GT: 0040-75150

Filler Chamber 2 APF Producer SE: 0040-75151

Pumping Liner Top Producer SE/GT: 0200-03969

Liner,Ceramic Middle, Producer SE: 0200-02396

Liner,Ceramic Bottom, Producer SE APF: 0200-03414

Big foot lift pin ,300MM,producer SE/GT: 0242-53926

Lift hoop,Pin Lift Fixed floating and big foot,producer SE/GT: 0200-08334

Shadow ring 0.8mm EE W/TAB,min Gap Produce SE: 0200-04086

Output manifold,left single hole ,blocker bypass: 0040-81935

Output manifold,right single hole ,blocker bypass: 0040-81934

Blank off,RPS port bypass output manifold produce: 0021-45732

C-Channel side 1 producer SE APF: 0200-03406

C-Channel side 2 producer SE APF: 0200-03407

Liner Pump Port Inner Producer SE APF: 0021-25807

Sleeve Slit Valve Producer SE/G APF : 0021-25781


Gas Box Configuration

Line 1: N.A

Line 2: C3H6 3SLM

Line 3: H2

Line 4: NH3 5SLM

Line 5: N.A

Line 6: 

Line 7: N.A

Line 8: Ar_Hi 10SLM

Line 9: O2 15SLM

Line 10: N2 10SLM

Line 11: He_hi 3SLM

Line 12: He_Lo 12SLM

Line 13: Ar_Lo 3SLM

Line 14 Gas: N.A

Line 14 Liquid Pos 1: N.A

Line 15: N.A

Line 16: N.A

Line 17 Gas: N.A

Line 17 Liquid Pos 2: N.A

Line 18: N.A

Line 19: N.A

Line 20 Gas: N.A

Line 20 Liquid Pos 3: N.A

Line 21: N.A

Line 22: N.A


Process Pump/Abatement

Pump: EDWARD iH1000

Scrubber: DAS


Kit Parts 

FI aligner : YES

shadow ring : YES


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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