Equipment details:
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Donor Mainframe SN: C13963
Chamber 1 SN: TTN00672
Chamber 2 SN: TTN00673
Chamber 3 SN: TTN00674
Chamber 4 SN: TTN00675
Gaspanel Configuration
Mass Flow Controller(ClF3 500 sccm) ClF3 500sccm Hitachi Metals SFC1470FAMC-4UGLN
Mass Flow Controller(N2 600/200 sccm) N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL
Mass Flow Controller(NH3 5000 sccm) NH3 5000sccm Hitachi Metals SFC1481FAMC-4UGL
Mass Flow Controller(NH3 300 sccm) NH3 300sccm Hitachi Metals SFC1480FAMC-4UGL
Mass Flow Controller(N2 600/200 sccm) N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL
Mass Flow Controller( NH3 1000 sccm) NH3 1000sccm Hitachi Metals SFC1480FAMC-4UGLK
DLI Vaporizer TiCl4 100sccm TiCl4 100sccm STEC VC1310-UC-19 SEF-8240SL-UC-VM03
Heater Bottm Purge N2 300sccm Hitachi Metals 280ERC-4VQ
GAS BOX ASSY, 300TIN,SDFAR25-S
Aire Operation Valves Fujikin MEGA series
Gas Filter Covalent Materials CEP-STM-2HS-FV7
Regulator Veriflo SQ2MICRO302PUPGPA
Process Kit
STG HTR 3M87-060128-13
TiN Shower Base 3M10-204535-11
V3 SHOWER SPARE (includes below items) 3M87-054539-11
PLATE SHOWER SPACER 300TIN S1 3M10-150079-11
PLATE SHOWER HEAD 300TIN 3M10-101634-11
BLOCK,GAS DIFFUSION 3M10-313563-11
SCREW SHORT HEAD M6*15 3M10-410281-11
SCREW SHORT HEAD M6*28 3M10-410282-11
SPRING WASHER SPAK M6 3M10-410283-11
TUBE,GAS INLET 300TIN 3M10-410298-11
WASHER FLAT..M6 MA22 RGLR 032-000841-1
Major components
1333Pa Manometor 3M36-000113-11 631C-28494 (MKS)
133kPa Capacitance manometer 3M36-050152-12 CDG160A-S 133KPA (INFICON)
O-rings 3M87-032321-1 PARTS KIT,RPL CH O-RING_300T
For stage heater Dupont KALREZ7075UP AS568A-247 BLK
For lid Dupont KALREZ4079 AS568A-390 BLK
For gas inlet Q'ty:3 Dupont KALREZ4079 AS568A-312 BLK
O-rings 3M87-032311-1 PARTS KIT,RPL GV O-RING_300T
Gate 3M12-012910-11 FG1232-KL03 (KITZ SCT)
Gate Dupont KALREZ4079 AS568A-274 BLK
Gate Valve (Slit Valve) 3M12-012890-22 UXG1232H-KL-77 (KITZ SCT)
APC Valve 3M12-050473-13 HVR-50HK-R (FUJI IMVAC)
Vacuum valve(VEP1) 3M80-000827-12 IVBH50CA-NWKL-52-W (KITZ SCT)
Vacuum valve(VEP2,3) 3M80-001344-14 IVBH50CY-NWKL-59-W (KITZ SCT)
Other
Differential Press. Gauge for exhaust system SUNX DP-M2
Flow Meter for cooling water Tokyo Flow Meter FF-MRA80-1-TYL3
Water Leak Sensor Toyokokagaku RS-1000C-NC/RS-1000D-6417
Divert Interlock Interface Relay unit for collective signal input
