Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal


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Asset ID: 205114

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: December 25, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Missing or damaged parts: Fab15 confirmed Qty 2 of SINGLE RING CERAMIC .50 HEIGHT 300MM HTD ESC (consumable items) are missing.

Please inspect to confirm any other missing or damaged parts.

Tool Model  Centura AP AdvancedEdge G5
Process   Metal
Sending Site Workstation Name   15-3AMAT_ADVTG5_W2
Software Version (include revision #)AMS 2.8_82
System Power Rating 208VAC 3-Phase
Loading Configuration 2 Carrier Stage
Tool under OEM service contract?   No

  Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1Centura G5 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position   2Centura G5 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position   3Centura AspCF4/O2/N2 
Chm/Unit Position   4Centura AspCF4/O2/N2 

Description   Qty
Tool:Centura Advantedge G5    
Process Unit:Advantedge G5Model:CenturaRemark  
MFC/Pressure Unit: MILLIPORE IntelliFlow(DeviceNet)    
Drive Mechanisms:GUI PC    
FOUP Opener: ADO    
Gas System:Device Net    
Exhuast System:TMP/Pump    
*All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)
Main AC Rack   1
Secondary AC Rack   1
IPUP   1
WFIB   4
Endpoint stand   1
Monitor stand   1
Side strage Left   1
Side strage Right   1
Main frame   1
DPS G5   2
Asp   2
FI   1

Tool is configured with endpoint.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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