Tokyo Electron Ltd. (TEL) Trias Ti/TiN

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool is configed with chamber Qty 4
Ti (PM1/PM3) TiN (PM2/PM4)
Basic System (TEL Trias) Tool ID: DBT106(TTTRL2E500)
Chamber Position: F16 Warehouse
Chamber Process type: SFD Ti / TiN

Gas Supply Config
Manual valve N*: Yes
Regulator (N2-1/N2-2): Yes
Regulator (N2-PF): Yes
Regulator (Ar): Yes
Pressure sensor (All gas line): No
Filter (N2-PF): No
Manual valve (Dry air line): Yes
Filter (Dry air line): No
Regulator (Dry air line): No
Pressure sensor (Dry air line): No
Pressure gauge (Dry air line): No

Chamber TEL TRIAS TIN
1333Pa Manometor: Yes
133kPa Capacitance manometer: Yes
O-rings: Yes
O-rings: Yes
O-rings, Cubic Trap I/O: Yes
Gate Valve (Slit Valve): Yes
APC Valve: Yes
Cubic Trap: Yes
Vacuum valve(VEP1): Yes
Vacuum valve(VEP2,3): Yes
Pressure Gauge, exhaust system: Yes
Flow Meter for cooling water: No
Water Leak Sensor: Yes

Gas Box Configuration
Gas Stick 1: Yes
Gas Stick 2: Yes
Gas Stick 3: Yes
Gas Stick 4: Yes
Gas Stick 5: Yes
Gas Stick 6: Yes
Gas Stick 7: Yes
Gas Stick 8: Yes
DLI: Yes
Heater Bottom Purge: Yes
Air Operation Valves: Yes
Gas Filters: Yes
Regulators: Yes
Gas lockout system: Yes

Kit Parts: 
STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5)
TiN Shower Base: Yes
"Inludes PLATE SHOWER SPACER 300TIN S1, PLATE SHOWER HEAD 300TIN, BLOCK GAS DIFFUSION, SCREW LONG HEAD M6X15, SCREW M6X28, SPRING WASHER SPAK M6, TUBE GAS INLET 300TIN, WASHER FLAT..M6 MA22 RGLR:
Ti Shower Head
Ti Quartz Filler
TiN Shower Plate
TiN Shower Block"