Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Centura AP Enabler

Asset ID: 54000

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Applied Materials (AMAT)

Centura AP Enabler

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: OX

Tool config is based on original PO, please verify tool details at tool inspection

Software Revision: B2.8_79

FI Software: FB4.70_12

GEM Software: 7.20_17

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)

Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assemblies

Interface A: Hardware related to EDA

Corrosion Resistant FI & SWLL: N/A

Loader Mod Corrosion Prevent: N/A

Standard SWLL: Standard SWLL

Side Storage Pod: Side Storage Pod (Left/Right)


Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch

Facility Plate: Manual Valve : Supplied by customer in floor

Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor

Transfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kit



Transfer Chamber Blade Kit: Transfer Chamber Accelerator Blade Kit

LL ISO-Slit Valve Grp Elast.: AP Chemraz 513 Elastomer

Atmospheric Robot: KAWASAKI A3

Mainframe Robot: VXP with Dual blade

Wafer Pass Through: Not available

Loadport type: Enhanced 25 wafer FOUP

Loadports: Loadport System

Open Cassettes Supported: N/A

Water Leak Detector: Configured

EMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.

System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)

Cable Length: RF Cable : 2 cables 75 ft; 1Short Cable

Cable Length: Mnitor Cable : 25 Ft 16ft effective

Cable Length: Pump Cable Length : 75 ft interface cable

Signal Tower: Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG

Inter Lock: On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.

Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.

Certificate of Cleanliness: N/A

Remote UPS Interface: N/A

Scrubber Interlock: N/A

Etch Common AC Rack: Lean AC Rack

"Chiller (wall/source): NX20A(ZT150 coolant)


Chiller (Dual Zone Cathode): NX20A (ZT130 coolant)

"Coolant: Galden ZT-130 for Cathode

Galden ZT-150 for Wall/Source

Galden FC-3283 for Cathode/Wall/Source


Chiller Hose Length: 75'

RF Gen TOP (162Mhz Source): 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)

"RF Gen #1 Bottom (13Mhz Bias): RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)


"RF Gen #2 Bottom (2 Mhz Bias): RF GEN PLASMA 9KW 2MHZ ENI)


"RF Match: Y


IPUP Type: Alcatel A100L (0190-01042)

Process Chb.1,2,3,&4: (IAEF) Enabler (Front End-E5)

Endpoint type (Eye-D): Endpoint type (Eye-D)(0246-00196)

Plasma State Monitor: Plasma State Monitor (1 per system) (0190-17948)

Spectrograph: EyeD HP Spectrongraph (0190-28658)

ESC type (Dual Zone): ESC type (Dual Zone) (0010-33416)

Cathode Base: Non-Anodized (0041-05779)

Cathode N2 Purge: Cathode N2 Purge - Yes

L-collar Si Insert Ring: L-collar Single Crystal Si Insert Ring 1.5mm step 

TMP: Shimadzu D3403M, 3000 litre

TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Foreline Transducer

Dry Pump: N(ESR80WN (EBARA) ; customer Supply)

Final Valve, Heater: N/A

Wfib: Y(Wfib - Mod (Restriction at RTN))


Slit Valves: Anodized (AL) 513 Chemrz

Pressure Monitor: 1,000 mt Head

Pressure Monitor: 100 mt Head

Pressure Monitor: Transducer 100 Torr Cal Tank

Pressure Monitor: Chamber ATM Switch : 51A13TGA2AA720 (MKS)

Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600Torr

Chamber Controller Module: SBC C400MHZ, 3U CPCI, 256MB RAM

FES Server: FES Server

NSR# 621632-0: Enabler Chamber FRCII, ratio 1000/1000

NSR# 621638-0: Chamber First in Fab for IADB Enabler Chamber

NSR# 621633-0: Transforma run to run option

Thottle Gate Valve (TGV): Throttle Gate Valve (TGV) - Ceramic 

Gas Line 1: Gas line 1- C4F6 100 sccm UNIT IFC-125

Gas Line 2: Gas line 2- CH2F2 100 sccm UNIT IFC-125

Gas Line 3: Gas line 3- C3F8 50 sccm UNIT IFC-125

Gas Line 4: Gas line 4- O2_M 300 sccm UNIT-125

Gas Line 5: Gas line 5- SO2 200 sccm UNIT IFC-125

Gas Line 6: Gas line 6- CF4 200 sccm UNIT IFC-125

Gas Line 7: Gas line 7 - C4F6_IGI 5 sccm UNIT-125

Gas Line 8: Gas line 8 - O2_IGI 5 sccm UNIT-125

Gas Line 9: Gas line 9- O2_L 50 sccm UNIT-125

Gas Line 10: Gas line 10- O2_H 5000 sccm UNIT-125

Gas Line 11: Gas line 11- Ar 2000 sccm UNIT-125

Gas Line 12: Gas line 12- N2 200 sccm UNIT-125

Gas Line 13: Gas line 13- CHF3 200 sccm UNIT-125

Gas Line 14: Gas line 14- C4F8 100 sccm UNIT-125

Gas Pallet Type: NextGen

Gas Pallet: ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN

Regulators: Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)

Valves: CKD

Transducers: Transducers inside MFC's

Flow Ratio Controller (NSTU): Flow Ratio Controller (NTSU)

IGI Interlock: N/A

Filters: MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)

Gas Leak Detection Port: External Connection Point

Gas Panel Exhaust: Top Exhaust

Gas Panel Facilities Hook Up: Single Line Drop

Piping: Standard high purity stainless & Exhaust through Gas box

Final Pressure Switch: At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmosphere

Purge: N2 (Process Grade N2)

L-collar Single Crystal Si: L-collar Singe Crystal Si Insert Ring 1.5mm step

Source Bottom Ring: QUARTZ RING SOURCE, E5(0200-07362)

Quartz Barrier Ring: Quartz Barrier Ring (0200-03170)

TGV o-ring: TGV o-ring (3700-03701)

TGV Hard Stop - Ceramic: TGV Hard Stop - Ceramic

TGV Pads: TGV Pades (0041-03304)

Source Chiller Bypass: Source Chiller Bypass 

Annular Baffle Heated: Annular Baffle Heated 

Cover, Lower Liner: Cover, Lower Liner

Upper Liner: SUPPORT LINER (0040-37601)

Process Kit: Process Kit

"Showerhead Assy: Showerhead Assy, 4mm SiC Top Electrode 

Tokai (0041-32335)"

Aluminum shims: Polymer Shims(0242-55460)

Plasma Containment Door: Plasma Containment Door

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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