Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)

LAM Research 2300 Exelan Flex - Chamber Only

Asset ID: 209777

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LAM Research

2300 Exelan Flex - Chamber Only

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Boise, United States

Available date: Currently Available

LAM 2300 Exelan Flex (Chamber only)


Vendor Tool Serial #23EX1616
Tool Model2300 EXELAN FLEX 
ProcessOxide 
Software Version1.8.4-SP2-HF1-Release 


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