Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. Tactras Vigus

Asset ID: 19031

Print spec sheet

Tokyo Electron Ltd.

Tactras Vigus

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: October, 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.


Chambers PM1 and PM2 are missing.

A Hard Disk Drive will be removed.


PM4 and PM5: a Vigus1_OX chamber.

UPDATED CONFIGURATION AVAILABLE: PLEASE ASK YOUR SALE PERSON.


[PM5]

Chamber type:Vigus

Gas config. (sccm)=FCS full scale

 C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)

 O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)

 CO(300)/N2(500)

 Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)

RF HF 40.68MHz, max 2700W

RF LF 3.2MHz, max 4500W

Temp Top +30~+150℃

     Wall +30~+60℃

     ESC 0~+80℃


[PM6]

Chamber type:Vigus

Gas config. (sccm)=FCS full scale

 C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)

 O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)

 CO(300)/N2(500)

 Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)

RF HF 40.68MHz, max 2700W

RF LF 3.2MHz, max 4500W

Temp Top +30~+150℃

     Wall +30~+60℃

     ESC 0~+80℃


Updated missing parts list as of October 18th, 2017.

Missing parts from Chambers PM5 and PM6.

Item No., Description, Parts No., Qty

1, FLOW MEASUREMENT FMGB-X0005, 2L80-001365-11, 1

2, SCREW(AL),SHIELD DEPO (VR2), 2L10-400177-11, 4

3, SCREW,WINDOW DEPO SAF0.5S V2, 2L10-451385-11, 4

4, WINDOW(YC),SHIELD DEPO V2, 2L10-352798-21, 2

5, WINDOW DEPO SAF0.5S V2, 2L10-450605-11, 2

6, UNDER SHIELD DEPO G30 V2E, 2L10-150465-14, 1

7, UPPER SHIELD DEPO 180,V2E, 2L10-150659-13, 1

8, FLUORITZ-TR AS329-SHAPES, 2L27-000007-11, 1

9, FLUORITZ-TR AS345-SHAPES, 2L27-000013-11, 1

10, KVZP08025, 2L27-000012-11, 1

11, KVZP08024, 2L27-000011-11, 1

12, VITON AS568-227 BLK, 027-000424-1, 1

13, RING,DEPO HEAT 180 V2E, 2L80-001483-12, 1

14, M4*8 SUS304, 020-000030-1, 24

15, CBSST3-6, 020-005946-1, 13

16, WSSS12-3-1, 026-004782-1, 12

17, PLATE(L),D3T6 EXHAUST V2E, 2L10-150492-12, 1

18, SHUTTER,LABYRINTH V2E, 2L10-251111-14, 1

19, #ACTUATOR, 012-013093-1, 1

20, CONTROLLER,PRESSURE 484510, 012-014399-1, 1

21, BARATRON 626B-28270, 2L80-000113-11, 1

22, BARATRON 626B-28274, 1D80-005607-12, 1

23, HIGH VOLTAGE DC POWER SUPPLY, 2L80-000558-16, 1

24, FCSP7102DW-4CW2-F250B, 015-022154-1, 1

25, FCSP7102DW-4CW2-F1600, N/A, 1

26, FCSP7102DW-4CW2-F64B, 015-021148-1, 1

27, FCSP7102DW-4CW2-F30, 015-021145-1, 1

28, XLA-25A-M9//-X1155, 2L12-000022-11, 1

29, XLA-25A-M9//-X1155, 2L12-000022-11, 1

Missing parts from Chamber PM6.

Item No., Description, Parts No., Qty

30, SCREW(AL),SHIELD DEPO (VR2), 2L10-400177-11, 4

31, SCREW,WINDOW DEPO SAF0.5S V2, 2L10-451385-11, 4

32, WINDOW(YC),SHIELD DEPO V2, 2L10-352798-21, 2

33, WINDOW DEPO SAF0.5S V2, 2L10-450605-11, 2

34, UNDER SHIELD DEPO G30 V2E, 2L10-150465-14, 1

35, UPPER SHIELD DEPO 180,V2E, 2L10-150659-13, 1

36, FLUORITZ-TR AS329-SHAPES, 2L27-000007-11, 1

37, FLUORITZ-TR AS345-SHAPES, 2L27-000013-11, 1

38, KVZP08025, 2L27-000012-11, 1

39, KVZP08024, 2L27-000011-11, 1

40, VITON AS568-227 BLK, 027-000424-1, 1

41, RING,DEPO HEAT 180 V2E, 2L80-001483-12, 1

42, M4*8 SUS304, 020-000030-1, 24

43, CBSST3-6, 020-005946-1, 13

44, WSSS12-3-1, 026-004782-1, 12

45, PLATE(L),D3T6 EXHAUST V2E, 2L10-150492-12, 1

46, SHUTTER,LABYRINTH V2E, 2L10-251111-14, 1

47, CONTROLLER,PRESSURE 484510, 012-014399-1, 1

48, BARATRON 626B-28270, 2L80-000113-11, 1

49, HIGH VOLTAGE DC POWER SUPPLY, 2L80-000558-16, 1

50, FCSP7102DW-4CW2-F64B, 015-021148-1, 1

51, FCSP7102DW-4CW2-F30, 015-021145-1, 1


Updated Modification Record as of January 30th, 2015

Modification, synopsis, Date, Worker, Specification sheet, Report

Direct connection of AC power, AC Power box for UPS removed, 28/06/2012, TEL, N/A, N/A

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