Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

KLA-Tencor Corp. AIT UV

Asset ID: 207236

Print spec sheet

KLA-Tencor Corp.


Darkfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available


Inspect to confirm configuration and condition.

Equipment configuration :ASYS S3 loadport*2 & Inspection unit*1 & Pillar*1

The equipment already de-hookup and store in fab temporary area.

Unable to take photo of the tool due to stored at one corner pack with other tools.

General System Info

Equipment ID: CUDDFINP-01

Date of Audit: Feb-2022

Serial Number: UV1041

Original Ship Date from KLA: 2006

Wafer Size (inches): 12

Loading Configuration: FOUP

Number of Cassette/FOUP Positions: 2

Software Version:

Login User ID: NA

Login Password: NA

Electrical Requirements: NA

Is System On-Line?: No

Off-Line Date (if applicable): NA

CE Mark Certified?: No

Date of Last PM: NA

Date of Last Laser Change: NA

OEM Audit Available?: No

Can Produce Wafers AS IS?: No

Any Known Field Modifications?: No

All Cables Present?: NA

System Configuration

Main Platform: Fusion UV

Key Common Options 

Clean Room Manuals: No

Standard Manuals: No

External Panels (Skins): Cleanroom White

Chuck Type: Universal Ceramic / Other

GEM/SECS Interface: Yes

AIT LUV Series Options 

Hierarchical Load Adaptive Thresholding (HLAT): No

Auto-Positioning System: No

iADC Processor: No

Internal Review – Optical Microscope 

Spot Optics (um): 3.5 um, 6 um

External Support Equipment

Laser Power Supply: Yes

Image Computer: Yes

Blower Box: Yes

Number of Blower Boxes: 1

Chiller Make/Model: KLA PILLAR

Damage/Missing parts list

Please inspect tool to reconfirm

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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