Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Expedius

Asset ID: 31234

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Tokyo Electron Ltd. (TEL)

Expedius

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 4/15/2022


Process: LAL


Tool config is based on original PO, please verify tool details at tool inspection


Tank: LAL30

Guide Material:PCTFE

Process Bath   Material:PTFE

Temp.:20℃

Mixing Ratio (1): "LAL30 

1:0"

Replenishment: Time   Yes

Replenishment:Level   Yes

Replenishment:Recipe   Yes

Replenishment:Pre/Post/Interval   Yes

Replenishment:Batch Count   Yes

Bath Function:Bath Autocover   Yes

Bath Function:Bath Cleaning   Yes

Bath Function:Sampling Line   Yes

Pump      IWKI : FF-20-BT1

Heater      Coolnics(NES-3123C-7-T)

Filter      "IHAT01M01K 0.01um"

Conc. Monitor      "CS-13M-777-

18P5390340P5P5"

Drain Line:WD1N   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes


Tank: QDR

Guide Material:PCTFE

Process Bath   Material:Quartz

Temp.:RT

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Drain Line:WD1 (HF Waste Water)   Yes

Drain Line:WD3 (UPW Reclaim)   Yes


Tank: POU1

Guide Material:Quartz

Process Bath   Material:PTFE

Temp.:RT/70℃

Mixing Ratio (1): HF:H2O

Mixing Ratio (2):"NH4OH:H2O2:H20

1:10:400

1:4:400

1:1:200"

Mixing Ratio (3):"NH4OH:H2O

1:100~1:200"

Mixing Ratio (4):"H2O2:H2O

1:15~1:200"

Mixing Ratio (5):"HCL:H2O2:H2O

 1:1:50 ~ 1:1:100"

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Bath Function: Agitation Yes

Bath Function: Megasonic SSDM 2800W

Bath Function: Hot DIW Generator PWH-144I-T-R

Bath Function:Sampling Line   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Hot DIW (Facility): 40 ~ 60 L/min

Conc. Monitor: "DHF/NH3 (HF-960M)

APM/HPM(CS-15M~)"

Drain Line:WD1 (HF Waste Water)   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD2N (Alkali Conc.)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes


Tank: POU

Guide Material:Quartz

Process Bath   Material:PTFE

Temp.:RT/70℃

Mixing Ratio (1): HF:H2O

Mixing Ratio (2):"NH4OH:H2O2:H20

1:10:400

1:4:400

1:1:200"

Mixing Ratio (3):"NH4OH:H2O

1:100~1:200"

Mixing Ratio (4):"H2O2:H2O

1:15~1:200"

Mixing Ratio (5):"HCL:H2O2:H2O

 1:1:50 ~ 1:1:100"

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Bath Function: Agitation Yes

Bath Function: Megasonic SSDM 2800W

Bath Function: Hot DIW Generator PWH-144I-T-R

Bath Function:Sampling Line   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Hot DIW (Facility): 40 ~ 60 L/min

Conc. Monitor: "DHF/NH3 (HF-960M)


Drain Line:WD1 (HF Waste Water)   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD2N (Alkali Conc.)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes


Tank: SD2

Guide Material:PCTFE

Process Bath   Material:PTFE

Temp.:RT

Bath Function: Over Flow Rinse Yes

Bath Function:Bath Autocover   Yes

Bath Function:N2 Purge   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Filter      PIPW15C3S (Metal)

Drain Line: WD3 (UPW Reclaim)   Yes

Drain Line: WD7 (Organic Waste Water)   Yes


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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