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You are here:   Macquarie Electronics > Equipment availability > Lam Research

Lam Research Rainbow 4520 Dielectric Etch System - SN 3039
  • Originally Installed December 1994
  • Currently Configured for 200mm Wafers
  • Configurable for 100mm, 125mm, and 150mm Wafers
  • Lam Envision Software
  • Through-The-Wall Configuration
  • Hine 38A Indexers
  • Circuit Breaker Style Panel Box
  • Bottom Actuated Clamped System
  • High Conductance Manifold
  • Low Frequency Auto-Tuning (LoFAT)
  • Dual Verity EP200Mmd Monochromator Endpoint Detection
  • Remote RF Cart
    • Advanced Energy PDW 2200 RF Generator
  • Lam 2080 Dual Channel TCU
  • Remote AC Box
  • Vacuum Pumps
    • Ebara A10
    • Ebara A70W
  • Orbitally Welded Gas Box
    • Backside Helium Cooling
Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model
1 Ar         
2 CF4         
3 CHF3      
4 He      
5 O2      
6 SF6      
7 N2      
8 He      


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Macquarie Capital (Europe) Limited is incorporated and registered as a private limited company in England and Wales with company number 03704031. Registered office is located at Level 30, CityPoint, 1 Ropemaker Street, London, EC2Y 9HD. Macquarie Capital (Europe) Limited is authorised and regulated by the Financial Services Authority (Firm No.193905).