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KLA-Tencor Surfscan 6220 Non-Patterned Wafer Particle Measurement System SN0497259

  • Configurable for Multiple Wafer Sizes up to 200mm
  • Dual Cassette Elevators
  • Left Elevator Cassette Plate Configuration: 8", EMPAK 9200 FL-192
  • Right Elevator Cassette Plate Configuration: 5"-6", UNIVERSAL
  • System is in excellent condition and has seen very little use
  • Particle Sensitivity: 0.09um
  • Haze Sensitivity: 0.02PPM
  • Haze Resolution: 0.002PPM
  • Count Accuracy: +/- 1%
  • V 208; A 16; Ph 1; Hz 60
  • Original Manufacture Date: April 1997
  • EL Listed

 

All equipment is offered subject to prior sale.  This item will be quoted based upon specific configuration, terms and configuration required.

Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 973 7842.



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